Product Name Hexamethyldisilazane
Synonyms 1,1,1,3,3,3-Hexamethyldisilazane; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine; Hexamethyl disilizane; HMDS
Molecular Formula C6H19NSi2
Molecular Weight 161.39
CAS Registry Number 999-97-3
EINECS 213-668-5
Properties
Density 0.765
Melting point -78 ºC
Boiling point 125 ºC
Refractive index 1.4069-1.4089
Flash point 20 ºC
Water solubility REACTS